作者：Reuge, N.;Dexpert-Ghys, J.;Caussat, B.;

作者单位：Laboratoire de Génie Chimique, UMR CNRS 5503, Universitéde Toulouse, 4, Allée Emile Monso, 31432, Toulouse Cedex 4, France;Laboratoire de Génie Chimique, UMR CNRS 5503, Universitéde Toulouse, 4, Allée Emile Monso, 31432, Toulouse Cedex 4, France;Laboratoi

刊名：Chemical vapor deposition

ISSN：0948-1907

出版年：2010-01-05

卷：16

期：41005

起页：123

止页：126

分类号：TQ175

语种：英文

关键词：

内容简介

Bismuth oxide thin films are of great interest due to their significant band gap, high refractive index, and dielectric permittivity, as well as marked photoconductivity and photoluminescence.[1] These properties make Bi) _2O_3 films well suited for many applications such as microelectronics,[2] sensor technology,[3] optical coatings,[4] and ceramic glass manufacturing.[5] Various precursors have been employed to synthesize Bi)_22O_3 films by CVD, including bismuth halides and bismuth triphenyl Bi(Ph)_3.[1,2,4,611] Halides are known to be toxic and corrosive. Bi(Ph)_3 is safer and offers remarkable advantages in terms of thermal stability and clean sublimation.[ 1] Bi(Ph)_3 is solid at ambient temperature and liquefies from 80 8C. In its gaseous state, when diluted in a neutral gas such as nitrogen and in the presence of oxygen, it reacts heterogeneously with this latter, at temperatures higher than 350 8C, to form solid Bi_2O_3.[1] Earlier reports[12] have identified four possible crystalline phases in micro-crystalline samples. The a monoclinic form is stable at room temperature; it transforms into d (cubic) at 729 8C. Two intermediate metastable phases, b (tetragonal) or g (cubic), may appear when cooling down; each returning to the a phase at room temperature. However, each of the crystalline phases a, b, g, d, or amixture of some or all of them, have been observed at room temperature when more or less thin films have been investigated.[1,2,11] More recently, v (triclinic, metastable) and e (orthorhombic) have also been referenced.[9] Therefore, the type of the deposited crystalline phase depends strongly on the experimental conditions and on the nature of the substrate.