作者：Jonathan Jilesen;Fue-Sang Lien;

作者单位：Department of Mechanical Engineering, University of Waterloo 200 University Avenue West, Waterloo, Ontario, N2L 2G1 (Canada);Department of Mechanical Engineering, University of Waterloo 200 University Avenue West, Waterloo, Ontario, N2L 2G1 (Canada)

刊名：Chemical vapor deposition

ISSN：0948-1907

出版年：2010-01-05

卷：16

期：40911

起页：65

止页：71

分类号：TQ175

语种：英文

关键词：Biomaterials;Calcium lactate;Hydroxyapatite;PP-MOCVD;Trimethyl phosphate;

内容简介

Currently there are two main methods used for coupling macroscopic reactor-scale and microscopic feature-scale models in multi-scale CVD simulation. These methods differ in the plane selected for coupling. With one method, coupling occurs at a source plane offset from the deposition surface, while in the other method coupling occurs on the deposition surface itself. The two methods also have different feature-scale modeling techniques associated with them. A Monte Carlo (MC) technique is used for the source plane-coupling method, while a ballistic transport technique is used for the deposition surface-coupling method. In this study a multi-scale code with a ballistic feature-scale model is modified so that both coupling methods can be applied, allowing for direct comparison of the two coupling methods.