作者：Jay J. Senkevich;Pei-I Wang;

作者单位：704 South Rolla St., Rolla, MO 65401 (USA);Center of Integrated Electronics, Rensselaer Polytechnic Institute Troy, New York 12180 (USA)

刊名：Chemical vapor deposition

ISSN：0948-1907

出版年：2009-01-05

卷：15

期：41005

起页：91

止页：94

分类号：TQ175

语种：英文

关键词：self-assembled monolayers;molecule;alkylthiolates;

内容简介

The study of how molecules interact at surfaces as been epitomized by self-assembled monolayers (SAMs). SAMs are long-chain alkyl chains, which interact with surfaces based on sulfur-coinage metal interaction (alkylthiolates) or a sol-gel type reaction with a hydroxylated oxide surface (trichlorosilyl alkyls or trialkoxy alkyls). However, unless the surface is carefully treated and the alkyl chain is long, these SAMs tend to form disordered monolayers, which do not pack well. Unlike SAMs, which pack based on the all trans configuration of the alkyl chain, the repeat unit of the parylenes (the monomer) interact with each other based on the high polarizability of the phenyl ring. These molecular layers are significantly more robust than alkyl-based SAMs, with a conformal vapor deposition process, superior thermal stability, selectivity versus transition metals,and functionalizability.These attributes may allow parylene molecular layers to find commercial interest in nanotechnology driven areas, where traditional SAMs have fallen short and are of mostly academic interest. In short, parylene molecular layers are a robust manufacturing process where little sample preparation is needed.