作者：Francesca Intranuovo;Eloisa Sardella;Pasqua Rossini;Riccardo d’Agostino;Pietro Favia;

作者单位：Department of Chemistry, University of Bari via Orabona, 4, 70126 Bari (Italy);CNR-IMIP Institute of Inorganic Methodologies and Plasma (IMIP) Bari (Italy);Plasma Solution Srl, Spin off of the University of Bari via Orabona, 4, 70126 Bari (Italy);Departme

刊名：Chemical vapor deposition

ISSN：0948-1907

出版年：2009-01-05

卷：15

期：41005

起页：95

止页：100

分类号：TQ175

语种：英文

关键词：Afterglow;Coatings;Hexafluoropropylene oxide;Microstructures;PECVD;

内容简介

Smooth and micro/nano-structured fluorocarbon coatings are obtained by radio frequency (RF), 13.56 MHz, glow discharges fed with hexafluoropropylene oxide (C3F6O, HFPO) both in glow and in afterglow. It is shown that the extent of micro/ nanostructuring, as well as the F/C ratio of the coatings, can be precisely tuned with both substrate position and deposition time. Nodular and ‘‘stone roses’’ morphological features are easily obtained, with good reproducibility, by controlling the plasma parameters. Both chemical and morphological features are shown to deeply affect film properties and, in turn, wetability, allowing a move from a hydrophobic behavior to a superhydrophobic one.