作者：O'Neill, L;O'Sullivan, C;

作者单位：Dow Corning Plasma Solut, Cork, Ireland.;Dow Corning Plasma Solut, Cork, Ireland.

刊名：Chemical vapor deposition

ISSN：0948-1907

出版年：2009-01-05

卷：15

期：40911

起页：21

止页：26

分类号：TQ175

语种：英文

关键词：aerosol;fluorocarbon;plasma;polymer;surface energy;

内容简介

By combining a non-equilibrium, atmospheric pressure, plasma jet with an aerosol delivery system, it is possible to deposit By combining a non-equilibrium, atmospheric pressure. polymeric coatings onto three-dimensional substrates. In this study, the effects of varying process parameters on the deposition of a fluorocarbon precursor, using this system, are investigated. A statistically designed experiment is undertaken to probe the factors altering the deposition properties. It is shown that highly functional coatings can be deposited with minimal fragmentation of the precursor monomer. Both the plasma power and distance from the plasma to the substrate are factors which significantly affect the deposition rate and chemistry of the coatings.