作者：NAOAKI NIWA;

作者单位：Surface Analysis Business Unit, Analytical & Measuring Instruments Division, Shimadzu Corporation

刊名：Journal of the Technical Association of Refractories

ISSN：0285-0028

出版年：2003-01-05

卷：23

期：2

起页：107

止页：111

分类号：TQ175

语种：英文

关键词：

内容简介

The Electron Probe Micro Analyzer (EPMA) was developed earlier than the Scanning Electron Microscope (SEM). In the 1940s, Castering was taking data by an EPMA prototype that he manufactured. At that time, the micron-scale analyzing point was determined using an optical microscope. Subsequently, EPMA developed into the present style incorporating multiplied functions such as SEM, Scanning Transmission Electron Microscope (STEM) and Cathode Luminescence. The EPMA, called an X-ray Micro Analyzer (XMA) in the early period of development, is used mainly with a Wavelength Dispersion Spectrometer (WDS) in Japan. Sometimes microanalysis with an SEM uses Energy Dispersion Spectroscopy (EDS) in other countries.