作者：Niu, J.;Liu, D.;Ou, Y.;You, Y.;Yu, N.;

作者单位：Research Center for Optoelectronics, Dalian Nationalities University, Dalian 116600, China;Research Center for Optoelectronics, Dalian Nationalities University, Dalian 116600, China;Research Center for Optoelectronics, Dalian Nationalities University, Dal

刊名：Chemical vapor deposition

ISSN：0948-1907

出版年：2010-01-05

卷：16

期：41099

起页：203

止页：205

分类号：TQ175

语种：英文

关键词：

内容简介

Large-area (370mm×500mm) diamondlike carbon (DLC) films were deposited on the glass substrate by low-pressure dielectric barrier discharges. The deposited DLC films were hard, homogeneous and extremely smooth. The DLC film deposited on the large-area glass can be potentially used as a scratch resistant and corrosion barrier layer.